Inner tube for use in a semiconductor wafer heat processing apparatus



FIG. 1: a perspective view of a inner tube for use in a semiconductor wafer heat processing apparatus;

FIG. 2: a front elevational view thereof, the rear elevational view, the right side view and the left side view are identical with the front view;

FIG. 3: a top plan view thereof;

FIG. 4: a bottom plan view thereof; and,

FIG. 5: a cross sectional view thereof taken along line V-V in FIG. 3. 

I claim the ornamental design for inner tube for use in a semiconductor wafer heat processing apparatus, as shown and described. 